Table 1 RTA vs. conventional hydrogen gas annealing
Hydrogenation methods | Conventional hydrogen gas annealing | RTA |
|---|---|---|
Chamber | Small sized samples Hot wall High energy consumption | Small and large scaled samples (<4”) Cool wall Low energy consumption → Local heating and soft treatment |
Ramping/cooling time | ~ Several hours | ~ Several seconds or minutes |
Holding time | ~0.5-1 h | ~1 h |
Sheet resistance of FTO | Increased with increased annealing temperatures | Unchanged with increased annealing temperatures |
Achieved photocurrent density (mA/cm2) at 0.23 V versus Ag/AgCl | 2.5 (Ref.4) 2.9 (Ref.15) | 3.7 (This work) |