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Table 2 Peak positions of CLs and VBM positions used to calculate the ΔE _V of the Al₂O₃/Zn_0.8Al_0.2O heterojunction

From: Band Offset Measurements in Atomic-Layer-Deposited Al₂O₃/Zn_0.8Al_0.2O Heterojunction Studied by X-ray Photoelectron Spectroscopy

	Zn_0.8Al_0.2O	Al₂O₃	3 nm Al₂O₃/Zn_0.8Al_0.2O	4 nm Al₂O₃/Zn_0.8Al_0.2O	5 nm Al₂O₃/Zn_0.8Al_0.2O
Al 2p		74.35	74.6	74.93	74.87
O 1s		531.1	531.32	531.66	531.63
Zn 2p _3/2	1021.41		1021.69	1022.05	1021.97
Zn 2p _1/2	1044.51		1044.85	1045.11	1045.64
VBM	2.26	3.19

The peak position of Zn 2p _1/2 in 5-nm Al₂O₃ sample listed by a bold number

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