Fig. 2From: Batch Fabrication of Broadband Metallic Planar Microlenses and Their Arrays Combining Nanosphere Self-Assembly with Conventional PhotolithographySEM images are shown for a self-assembled orderly packed monolayer PS nanospheres of 900 nm diameter, (b) PS size shrinkage by O2 plasma containing the defects of vacancies and multilayer, (c) randomly packed PS nanospheres, and (d) an enlarged view of a hexagonally packed PS unitBack to article page