Fig. 3From: Batch Fabrication of Broadband Metallic Planar Microlenses and Their Arrays Combining Nanosphere Self-Assembly with Conventional Photolithography a Diffraction image of the fabricated 4-in. wafer-level monolayer nanosphere mask. Photographs of the fabricated microlenses and their arrays on a glass substrate in (b) the wafer level and (c) the chip level. d Optical microscope image of the 8-μm microlens and its 5 × 5 array spacing 4 μm apartBack to article page