Fig. 3From: Sliding Speed-Dependent Tribochemical Wear of Oxide-Free SiliconHigh-resolution TEM images of wear scar on Si substrate formed at sliding speed values of 0.08 (a) and 50 μm/s (b) in humid air. The insets show the wear scars with depths of ~11 nm in (a) and 2.3 nm in (b)Back to article page