Table 1 Calculated and measured Talbot distance and the shrinkage factor
Talbot distance | Shrinkage factor | |
---|---|---|
Theoretical | 3.23 μm | — |
SU-8 template | 2.31 μm | 29.2 ± 1.4% |
Talbot distance | Shrinkage factor | |
---|---|---|
Theoretical | 3.23 μm | — |
SU-8 template | 2.31 μm | 29.2 ± 1.4% |