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Table 1 Threshold voltages of HEMTs having MMC structures of various lengths and widths, measured at a drain current of 1 mA/mm

From: Breaking Through the Multi-Mesa-Channel Width Limited of Normally Off GaN HEMTs Through Modulation of the Via-Hole-Length

MMC length

MMC width

100 nm

300 nm

500 nm

0.8 μm

-0.41 V

-2.15 V

-2.62 V

1 μm

-0.14 V

-2.12 V

-2.52 V

2 μm

+0.79 V

-1.32 V

-2.18 V

4 μm

-1.07 V

-2.07 V

6 μm

+0.46 V

-1.62 V

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