Fig. 1From: Au-Capped GaAs Nanopillar Arrays Fabricated by Metal-Assisted Chemical EtchingSchematic model of the fabrication of GaAs nanopillar arrays. a Vacuum deposition of Au on a GaAs substrate through porous alumina mask. b Removal of the mask. c, d Chemical etching of GaAs using Au nanodot arrays as a catalystBack to article page