Fig. 5From: Au-Capped GaAs Nanopillar Arrays Fabricated by Metal-Assisted Chemical EtchingCross-sectional SEM images of a GaAs nanopillar array fabricated by Au-assisted chemical etching at 20 °C for a 10 and b 60 s in a solution containing 20 mol dm−3 HF and 0.01 mol dm−3 KMnO4. Inset shows a surface image of an Au-capped GaAs nanopillar arrayBack to article page