Fig. 3From: Optical and Electronic Properties of Femtosecond Laser-Induced Sulfur-Hyperdoped Silicon N+/P PhotodiodesPhotoresponse of n+/p detectors with different ion-implantation dose. Inset shows the top view and sectional view of the device. Light gray shows the patterns of interdigitated contact on microstructured surface and all standing contact on backsideBack to article page