Fig. 1From: Method for Measurement of Multi-Degrees-of-Freedom Motion Parameters Based on Polydimethylsiloxane Cross-Coupling Diffraction GratingsFabrication process and morphology characterizations of PDMS double optical grating. a Fabricating double optical grating. b The optical images of grating. c Atomic force microscopy image of the grating. d The uniformity of periodicity for the samplesBack to article page