Fig. 1
From: Fermi Level Tuning of ZnO Films Through Supercycled Atomic Layer Deposition
a Illustration of the one growth supercycle of the proposed supercycled ALD process. b ZnO growth rates as a function of the O2 plasma time for supercycled ALD with fixed thermal cycle (m = 1) and plasma-enhanced ALD processes; the dashed curves are guides of the eye. c ZnO growth rate and linear fitting as a function of the thermal process cycle m with fixed O2 plasma times (t 3 = 1 and 8 s)