Fig. 3From: Fermi Level Tuning of ZnO Films Through Supercycled Atomic Layer Deposition a Electrical resistivity of ZnO films grown from different O2 plasma times with fixed thermal cycle m (solid dots) and different thermal cycles with fixed O2 plasma time (open dots) by the supercycled ALD process. b Carrier concentration (blue) of ZnO films grown from different O2 plasma times with fixed thermal cycle (solid dots) and different thermal cycles with fixed O2 plasma time (open dots). Mobility (green) of ZnO films grown from different O2 plasma times with a fixed thermal cycleBack to article page