Fig. 6From: Fermi Level Tuning of ZnO Films Through Supercycled Atomic Layer Deposition a–e XPS spectra and their Gaussian fittings of the O 1s region of the supercycled ALD-grown ZnO films with O2 plasma time (t 3) varying from 0 to 8 s and fixed thermal cycle (m = 1). f Proportion of the hydrogen-related OB peak in ZnO films grown with varying O2 plasma times (solid dots) and thermal cycles (open dots)Back to article page