Fig. 4From: Charge Splitting In Situ Recorder (CSIR) for Real-Time Examination of Plasma Charging Effect in FinFET BEOL Processes a Charge splitting in situ recorder with two separate floating gates by connecting to a forward diode (D1) and a reverse diode (D2) for detecting electron/ion charging, respectively. b Cross-sectional illustration of the new charge splitting in situ recorder with on-chip pn diodes, directing the positive and negative charge to the separated coupling gates, CG1 and CG2 Back to article page