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Fig. 4 | Nanoscale Research Letters

Fig. 4

From: Charge Splitting In Situ Recorder (CSIR) for Real-Time Examination of Plasma Charging Effect in FinFET BEOL Processes

Fig. 4

a Charge splitting in situ recorder with two separate floating gates by connecting to a forward diode (D1) and a reverse diode (D2) for detecting electron/ion charging, respectively. b Cross-sectional illustration of the new charge splitting in situ recorder with on-chip pn diodes, directing the positive and negative charge to the separated coupling gates, CG1 and CG2

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