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Table 2 The thicknesses of AZO layer obtained from TEM and fitted by SE, and the fitting error RMSE

From: Effects of Bilayer Thickness on the Morphological, Optical, and Electrical Properties of Al₂O₃/ZnO Nanolaminates

Sample	Thickness_TEM (nm)	Thickness_SE (nm)	RMSE
2 (25/25 nm)	89.2	86.64	1.17
5 (10/10 nm)	–	88.18	0.83
10 (5/5 nm)	87.7	87.31	0.77
25 (2/2 nm)	–	80.90	0.69
50 (1/1 nm)	75.5	74.80	0.42

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