Correction to: Charge Splitting In Situ Recorder (CSIR) for Real-Time Examination of Plasma Charging Effect in FinFET BEOL Processes
© The Author(s). 2017
Published: 8 November 2017
The original article was published in Nanoscale Research Letters 2017 12:534
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- Tsai Y-P (2017) Charge splitting in situ recorder (CSIR) for real-time examination of plasma charging effect in FinFET BEOL processes. Nanoscale Res Lett 12:534 doi:10.1186/s11671-017-2309-0