Fig. 3
From: Preparation and Thermoelectric Characteristics of ITO/PtRh:PtRh Thin Film Thermocouple
The cross-section SEM image of ITO/PtRh composite film. The cross-section image of ITO/PtRh composite film deposited on Si (100) substrate was obtained with SEM. ITO and Pt-13%Rh films were deposited alternatively to form ITO/PtRh composite film. The total thickness of the composite film was approximately 1 μm and the thickness of single ITO layer was roughly 400 nm, which was four times than that of the thickness of Pt-13%Rh layer