Table 1 Sputtering parameters of ITO and Pt-13%Rh thin films
From: Preparation and Thermoelectric Characteristics of ITO/PtRh:PtRh Thin Film Thermocouple
Sputtering parameters | Pressure (Pa) | Sputtering | Power (W) | Sputtering media | Temperature |
---|---|---|---|---|---|
ITO | 0.4 | RF | 150 | Ar/O2 = 40:2 | RT |
Pt-13%Rh | 0.4 | DC | 120 | Ar | RT |