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Table 1 Sputtering parameters of ITO and Pt-13%Rh thin films

From: Preparation and Thermoelectric Characteristics of ITO/PtRh:PtRh Thin Film Thermocouple

Sputtering parameters

Pressure (Pa)

Sputtering

Power (W)

Sputtering media

Temperature

ITO

0.4

RF

150

Ar/O2 = 40:2

RT

Pt-13%Rh

0.4

DC

120

Ar

RT

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