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Fig. 1 | Nanoscale Research Letters

Fig. 1

From: Surface Nanostructures Formed by Phase Separation of Metal Salt–Polymer Nanocomposite Film for Anti-reflection and Super-hydrophobic Applications

Fig. 1

Fabrication process of ultra-high resolution nanostructures using self-assembly of metal salt–polymer nanocomposite film. (1) Spin-coating film from a solution containing polymer and salt. (2) Phase separation by thermal annealing. (3) Etching polymer using oxygen plasma and leaving behind metal salt nanoislands on silicon. (4) Etching silicon using fluorine based plasma with metal salt nanoislands as mask

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