Fig. 4From: TEM and STEM Studies on the Cross-sectional Morphologies of Dual-/Tri-layer Broadband SiO2 Antireflective Filmsa SEM images of sol C based single-layer film. b Cross-sectional SEM images of sol C based single-layer film. c SEM images of sol D based single layer film. d Cross-sectional SEM images of sol D based single layer filmBack to article page