Fig. 5From: TEM and STEM Studies on the Cross-sectional Morphologies of Dual-/Tri-layer Broadband SiO2 Antireflective Filmsa HRTEM images of interfacial area between Si substrate and silica film. b TEM images of interfacial area between two layers. Insert is the Fourier transforming spectra. c–e EDS images of dual-layer silica film via STEM. f Cross-sectional TEM images of dual-layer filmBack to article page