Fig. 6From: TEM and STEM Studies on the Cross-sectional Morphologies of Dual-/Tri-layer Broadband SiO2 Antireflective Filmsa TEM image of the tri-layer films. b TEM image of high magnification from the same sample. c DF-STEM images of cross-sectional tri-layer film. d, e EDS images of dual-layer silica film via STEMBack to article page