Table 1 Comparison of box resistance in P-N injection and PECVD effect between inverted and upright pyramid structures
Box resistance in P-N injection | PECVD | |||
---|---|---|---|---|
Average/Ω | STD | Thickness of SiNx film/nm | Refractive index | |
Inverted pyramid sc-Si | 80.44 | 4.36 | 73.05 | 2.00 |
Upright pyramid sc-Si | 80.32 | 4.48 | 83.75 | 1.96 |