Fig. 5From: A Theoretical Simulation of the Radiation Responses of Si, Ge, and Si/Ge Superlattice to Low-Energy Irradiationa–e Schematic view of geometrical structures of damage Si/Ge superlattice after Ge recoil events. The blue and green spheres represent the Si and Ge atoms, respectively. V X : X vacancy (X = Si or Ge); Xint: X interstitial (X = Si or Ge); X Y : X occupying the Y lattice site (X and Y = Si or Ge). The purple and red spheres represent the vacancy and interstitial defects, respectivelyBack to article page