Table 1 Thickness of AZO films simulated by SE and measured by SEM, respectively
From: Optical Properties of Al-Doped ZnO Films in the Infrared Region and Their Absorption Applications
Methods | 150 cycles | 300 cycles | 450 cycles |
|---|---|---|---|
SE (nm) | 26.0 | 50.3 | 75.6 |
SEM (nm) | 24.8 | 47.3 | 75.4 |