Fig. 3From: Reduced Contact Resistance Between Metal and n-Ge by Insertion of ZnO with Argon Plasma TreatmentTEM image for an Al/ZnO/n-Ge sample showing the uniform ZnO layer between Al and Ge. Top right inset shows the HRTEM image of Al/ZnO/n-Ge interface, and the top left inset shows the XPS Ge 3d result of the sample demonstrating the existence of GeOx interfacial layerBack to article page