Table 1 Electrical parameters of CuAlO2 TFTs with different annealing temperature
Annealing temperature (°C) | Ion (A) | Mobility (cm2 V−1 s−1) | Ion/Ioff | VT (V) | SS (V) | Nt (10–17 cm−2) |
---|---|---|---|---|---|---|
700 | 1.23 × 10−6 | 0.006 ± 0.004 | ~ 103 | − 14.7 ± 0.8 | 14.9 | 1.79 |
800 | 5.27 × 10−6 | 0.028 ± 0.008 | ~ 103 | − 9.5 ± 0.6 | 9.1 | 1.10 |
900 | 7.79 × 10−6 | 0.051 ± 0.011 | ~ 103 | − 2.9 ± 0.5 | 9.0 | 1.07 |
1000 | 1.45 × 10−5 | 0.098 ± 0.009 | ~ 103 | − 1.3 ± 0.5 | 8.6 | 1.03 |