Table 1 Elemental composition of a-VOx films
Film | O (At%) | V (At%) | O/V ratio |
---|---|---|---|
a-VOx-0 Pa | 43.1 | 56.9 | 0.757 |
a-VOx-6 Pa | 68.1 | 31.9 | 2.135 |
a-VOx-13 Pa | 69.2 | 30.8 | 2.247 |
a-VOx-30 Pa | 66.7 | 33.3 | 2.003 |
Film | O (At%) | V (At%) | O/V ratio |
---|---|---|---|
a-VOx-0 Pa | 43.1 | 56.9 | 0.757 |
a-VOx-6 Pa | 68.1 | 31.9 | 2.135 |
a-VOx-13 Pa | 69.2 | 30.8 | 2.247 |
a-VOx-30 Pa | 66.7 | 33.3 | 2.003 |