Fig. 2
Local melting effects observed in a SEM. a SEM image of a Pt-Cr TFTC array sample, showing two holes (highlighted with red arrows) were made by e-beam irradiation at the junction regions of two Pt-Cr TFTC sensors. b AFM image of the same two junctions, showing detailed 3D information of the two holes. c Four Pd-Cr TFTC sensors made on a 400-nm-thick, freestanding Si3N4 thin film window. Two TFTCs (highlighted with white arrows) at the left wide of the window were burnt with a focused 785 nm laser. d The corresponding output peak of the Pd-Cr TFTC when it was burnt with the laser