Fig. 4From: Measurement and Evaluation of Local Surface Temperature Induced by Irradiation of Nanoscaled or Microscaled Electron BeamsImages TFTC samples in Si and the testing results. a Optical image of a TFTC array on Si with junction size of 5.0 × 5.0 μm2. b SEM image of the device center, showing 24 sensor junctions. c Measurement results of local temperature increment with the TFTCs under e-beam irradiation with different accelerating voltages and beam currentsBack to article page