Fig. 6
A TFTC array and its measurement results. a SEM image of a Pt-Cr TFTC array sample on the front surface of a Si3N4/Si(100)/Si3N4 wafer. The TFTC array on the central of the device consisted of 24 TFTCs, which had junction size ranged from 2.0 × 2.5 to 8.0 × 8.5 μm2. b Measured outputs from one TFTC sensor when a focused e-beam of diameter 1 micro was irradiating on a spot of the two metallic thin film stripes of the TFTC, namely Pt and Cr, at certain distance to the Pt-Cr junction region