Fig. 7
SEM images of a TFTC array and its measurement results. a SEM image of a Pt-Cr TFTC array on thick Si wafer with identical original junction size of 5.0 × 5.0 μm2. One junction (highlighted with a dashed yellow frame) was cut with FIB to a junction area of 1.0 × 1.0 μm2. b SEM image of the FIB fabricated junction area in (a). c Measured outputs from an original TFTC and the small junction TFTC under the same e-beam irradiation