Fig. 8
An illustration for the overall picture of the nominal local temperatures under irradiation of nano-/micro-scale e-beams. The gray oval indicates the comparison between small and large TFTCs on thick Si wafers. The yellow oval indicates the comparison between TFTCs on thick Si wafers and on freestanding Si3N4 thin film windows. For T > 1500 K, the data points are estimated values from morphology or phase change