Fig. 3From: Investigation of the Energy Band at the Molybdenum Disulfide and ZrO2 Heterojunctionsa O 1 s photoelectron energy loss spectra for the ZrO2 oxide. b The schematic structure of the energy band alignment at the MoS2/ZrO2 interface without (top) and with (bottom) CHF3 plasma treatment. c The SIMS depth profiles (Si, Zr, and F) for the sample with CHF3 plasma treatmentBack to article page