Fig. 4From: All-Si Photodetectors with a Resonant Cavity for Near-Infrared Polarimetric DetectionMicrographs by scanning electron microscope (SEM) for the fabricated MS photo-electron detectors. a Str.1: the overview of the device with the bonding pad only. b Str.2: the Au grating-planar Si located inside the square window. c Str.3: the cross-sectional view of Au grating-Si NW device. d Str.4: the cross-sectional view of the finally fabricated device with resonant cavitiesBack to article page