Fig. 1From: Dielectric Enhancement of Atomic Layer-Deposited Al2O3/ZrO2/Al2O3 MIM Capacitors by Microwave Annealinga The schematic structure of Al2O3/ZrO2/Al2O3-based MIM capacitor. b The schematic structure of the MWA chamber. c TEM picture of Al2O3/ZrO2/Al2O3-based MIM capacitor with MWA at 1400 W for 5 minBack to article page