Fig. 2From: Dielectric Enhancement of Atomic Layer-Deposited Al2O3/ZrO2/Al2O3 MIM Capacitors by Microwave Annealinga The cumulative probability plot of the capacitance density for different samples; the inset displays the capacitance density against the bias. b The cumulative probability plot of the permittivity of ZrO2 for different samples; the inset exhibits the XRD patterns of the as-deposited and 1400 W samplesBack to article page