Fig. 4
Simulation and measurement results of the bilayer-structured pyroelectric sensor. a Explored schematic of the device structure. b Model and results of piezoelectric response simulation. c Model and results of thermal simulation. d Optical photo of the fabricated device. e Piezoelectric response at different frequencies. f Responses of the bilayer and conventional monolayer devices when simultaneously stimulated by mechanical vibration (5 Hz) and thermal irradiation (1 Hz)