Fig. 3From: New Insights on Factors Limiting the Carrier Transport in Very Thin Amorphous Sn-Doped In2O3 Films with High Hall MobilityMass density dm derived from XRR measurement results of a-ITO films grown at an OFR of 20 sccm (triangles) or 30 sccm (circles) as a function of film thickness tBack to article page