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Table 1 Thickness (t), mass density (dm), and surface and interface roughness (rs and ri, respectively) for a-ITO films determined by XRR measurements

From: New Insights on Factors Limiting the Carrier Transport in Very Thin Amorphous Sn-Doped In2O3 Films with High Hall Mobility

Film #

OFR (sccm)

t (nm)

dm (g cm−3)

rs (nm)

ri (nm)

1

20

5.12

6.62

0.89

0.92

2

7.14

6.95

0.89

1.04

3

10.3

7.17

0.88

1.04

4

20.9

7.18

0.84

1.06

5

30.0

7.08

0.74

1.06

6

47.6

7.17

0.77

0.90

7

30

5.10

6.76

0.92

0.93

8

7.26

7.13

0.74

0.84

9

10.2

7.08

0.76

0.84

10

20.9

7.19

0.81

1.00

11

30.2

7.15

1.10

1.53

12

49.5

7.13

0.69

0.84

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