Table 1 Thickness (t), mass density (dm), and surface and interface roughness (rs and ri, respectively) for a-ITO films determined by XRR measurements
Film # | OFR (sccm) | t (nm) | dm (g cm−3) | rs (nm) | ri (nm) |
---|---|---|---|---|---|
1 | 20 | 5.12 | 6.62 | 0.89 | 0.92 |
2 | 7.14 | 6.95 | 0.89 | 1.04 | |
3 | 10.3 | 7.17 | 0.88 | 1.04 | |
4 | 20.9 | 7.18 | 0.84 | 1.06 | |
5 | 30.0 | 7.08 | 0.74 | 1.06 | |
6 | 47.6 | 7.17 | 0.77 | 0.90 | |
7 | 30 | 5.10 | 6.76 | 0.92 | 0.93 |
8 | 7.26 | 7.13 | 0.74 | 0.84 | |
9 | 10.2 | 7.08 | 0.76 | 0.84 | |
10 | 20.9 | 7.19 | 0.81 | 1.00 | |
11 | 30.2 | 7.15 | 1.10 | 1.53 | |
12 | 49.5 | 7.13 | 0.69 | 0.84 |