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Fig. 4 | Nanoscale Research Letters

Fig. 4

From: Nanofabrication of High-Resolution Periodic Structures with a Gap Size Below 100 nm by Two-Photon Polymerization

Fig. 4

SEM images of grating lines fabricated with different materials. The speed for the fabrication is 7 μm/s. a Material: Zr-hybrid material; PD=1 μm; Laser intensity: 1.25 kW/ μm2. b Material: E-shell 300; PD=1 μm; Laser intensity: 1.02 kW/ μm2. c Material: Zr-hybrid material; PD=400 nm; Laser intensity: 0.69 kW/ μm2. d Material: E-shell 300; PD=400 nm; Laser intensity: 0.69 kW/ μm2

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