Fig. 4
SEM images of grating lines fabricated with different materials. The speed for the fabrication is 7 μm/s. a Material: Zr-hybrid material; PD=1 μm; Laser intensity: 1.25 kW/ μm2. b Material: E-shell 300; PD=1 μm; Laser intensity: 1.02 kW/ μm2. c Material: Zr-hybrid material; PD=400 nm; Laser intensity: 0.69 kW/ μm2. d Material: E-shell 300; PD=400 nm; Laser intensity: 0.69 kW/ μm2