Skip to main content

Advertisement

Fig. 6 | Nanoscale Research Letters

Fig. 6

From: Nanofabrication of High-Resolution Periodic Structures with a Gap Size Below 100 nm by Two-Photon Polymerization

Fig. 6

The influence of laser focus positions on structure formation. Material: E-shell 300. a Vertical grating lines fabricated with laser focus more inside the photoresist. The laser intensity for fabrication I=0.71 kW/ μm2 (corresponding to laser power 1.55 mW), the relative laser focus distance Δz=500 nm. Extra polymerization between the features is generated, and the adjacent features are connected. b Vertical grating lines fabricated with laser focus more inside the substrate. The laser intensity for fabrication I=0.65 kW/ μm2 (corresponding to laser power 1.4 mW), the relative laser focus position Δz=0 nm

Back to article page