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Fig. 2 | Nanoscale Research Letters

Fig. 2

From: Fabrication of polydimethylsiloxane nanofluidic chips under AFM tip-based nanomilling process

Fig. 2

Flowchart of nanofluidic chip fabrication: (a1)–(a6) Working steps of microchannel fabrication on a PDMS chip; (a1) Silicon sheet used for lithography substrate; (a2) Spin-coating of SU8 photoresist on Si substrate; (a3) Exposure of the SU8 layer to UV light; (a4) Obtained convex microstructures; (a5) PDMS coating on microchannel mould; (a6) Final PDMS chip with microchannels; (b1)–(b2) Working steps of nanochannel fabrication on a PDMS chip; (b1) AFM tip scratches on PC sheet; (b2) Obtained nanochannel mould after scratching; (b3) A-PDMS coating on nanochannel mould; (b4) A-PDMS chip with convex nanostructures; (b5) Regular PDMS coating on A-PDMS mould; (b6) Final PDMS chip with nanochannels; (c) PDMS nanofluidic chip after bonding

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