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Fig. 4 | Nanoscale Research Letters

Fig. 4

From: Fabrication of polydimethylsiloxane nanofluidic chips under AFM tip-based nanomilling process

Fig. 4

Relationship between machined nanochannel size and machining parameters: a single scratching with normal loads range from 25 μN to 58 μN, b depth, and c width of the machined channels when fabricated with normal loads of 17 μN, 25 μN and driving frequencies of 100 Hz, 150 Hz, d the depth and width of the machined channels when fabricated with normal load of 25 μN and driving frequency of 1500 Hz

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