Fig. 5From: Fabrication of polydimethylsiloxane nanofluidic chips under AFM tip-based nanomilling processTypical AFM images of the machined nanochannel with different machining parameters: a Scratching under a normal load of 42 μN. b Nanomilling under a normal load of 25 μN, a frequency of 100 Hz, and a driving voltage of 60 VBack to article page