Fig. 2From: Enhanced Si Passivation and PERC Solar Cell Efficiency by Atomic Layer Deposited Aluminum Oxide with Two-step Post Annealinga Injection-level-dependent minority carrier lifetime. b Lifetime at an injection level of 3 × 1015 cm−3 for Al2O3/Si/Al2O3 samples with O2, FG, and two-step annealingBack to article page