Fig. 5From: Enhanced Si Passivation and PERC Solar Cell Efficiency by Atomic Layer Deposited Aluminum Oxide with Two-step Post Annealinga Injection-level-dependent minority carrier lifetime of SiNx/Al2O3-passivated samples with O2, FG, and two-step annealing. b Lifetime at an injection level of 3 × 1015 cm−3 for 50 samples with two-step annealingBack to article page