Fig. 6

a Schematic side view diagram for flip-chip DUV LED with hybrid p-GaN nanorod/p-AlGaN truncated nanocone contacts. LEEs of TE-polarized light (b) and of TM-polarized light (c) as a function of the nanorod spacing for DUV LEDs, and the structures are with the 100-nm-high p-GaN and 75-nm-high p-AlGaN (the inclined angles are set to 30°, 50°, 75°, and 90°)