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Table 1 Comparison of experimental results

From: Novel High Holding Voltage SCR with Embedded Carrier Recombination Structure for Latch-up Immune and Robust ESD Protection

Experimental devices L/W
(μm/μm)
Vh (V) It2 (A) V CL @1.3 A
(V)
FOM
(mW/μm)
Conventional LVTSCR 15/50 1.8(< 5) 3.2 4.8 110
Proposed HHV-SCR d2 (μm) d1 (μm) L/W
(μm/μm)
Vh (V) It2 (A) V CL @1.3 A
(V)
FOM
(mW/μm)
0.5 0.0 17/50 8.0 3.04 8.5 490
0.2 17.4/50 7.4 3.12 8.9 460
0.4 17.8/50 6.1 3.0 8.9 370
0.6 18.2/50 5.5 2.7 9.5 300
1.0 0.0 17.5/50 8.1 2.8 8.4 450
0.2 17.9/50 8.0 2.8 8.8 450
0.4 18.3/50 7.0 3.0 8.8 420
0.6 18.7/50 6.0 2.9 9.8 350